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  • 1 Rijksuniversiteit Gent Institute for Nuclear Sciences Proeftuinstraat 86 B-9000 Gent (Belgium)
  • | 2 National Fund for Scientific Research (Belgium)
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The determination of boron, carbon, nitrogen and oxygen in metals and semiconductors by charged particle activation analysis (CPAA) is reviewed. It is shown that CPAA is a sensitive and accurate method suitable for the analysis of reference materials.