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  • 1 I. Physikalisches Institut der Universität zu Köln Köln BRD
  • 2 Balzers AG FL-9496 Balzers
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The mass spectrum of secondary ions emitted from a solid surface under ion bombardment is characteristic of the composition of the superficial monolayers. By the use of very low primary ion current densities and highly sensitive detection techniques, analysis can be performed without measurable disturbance of the original first monolayers. Some results demonstrating the capabilities of this ‘static’ method of secondary ion mass spectrometry (SIMS) are presented.