Determination of the concentrations of trace and doping elements in GaAs by neutron activation analysis

R. Liu; P. Chen; Z. Alfassi; M. Yang

doi:10.1007/bf02035799

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Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 141: Issue 2

Determination of the concentrations of trace and doping elements in GaAs by neutron activation analysis

Authors:

R. Liu

R. Liu National Tsing Hua University Institute of Nuclear Science 30043 Hsinchu Taiwan (R.O.C.

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P. Chen

P. Chen National Tsing Hua University Institute of Nuclear Science 30043 Hsinchu Taiwan (R.O.C.

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Z. Alfassi

Z. Alfassi National Tsing Hua University Institute of Nuclear Science 30043 Hsinchu Taiwan (R.O.C.

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M. Yang

M. Yang National Tsing Hua University Institute of Nuclear Science 30043 Hsinchu Taiwan (R.O.C.

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Pages:: 317–326

Online Publication Date:: 13 Aug 2005

Publication Date:: 17 Aug 1990

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02035799

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Abstract

The concentrations of ten trace and dopant elements in GaAs semiconductor were determined by reactor neutron activation analysis after removal of As by evaporation of AsCl₃. The retentions of the elements of interest were measured using radiotracers. The concentrations of doping elements (Te, Cr and Zn) in commercial GaAs samples were compared to the limit of detection of these elements to analyze the possibility to use NAA for concentration depth profiling measurements. The NAA results were compared with those of electrical measurements and SIMS and the discrepancies found are discussed.

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Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)