Journal of Radioanalytical and Nuclear Chemistry
Volume/Issue:
Volume 152: Issue 2
Preparation of lanthanide, thorium and uranium oxide films by chemical vapor deposition using β-diketone chelates
Authors:
Y. Shiokawa Tohoku University Institute for Materials Research Katahira 2-1-1, Aoba-ku 980 Sendai (Japan)

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R. Amano Kanazawa University School of Allied Medical Professions Kodatsuno 5-11-80 920 Kanazawa (Japan)

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A. Nomura Tohoku University Institute for Materials Research Katahira 2-1-1, Aoba-ku 980 Sendai (Japan)

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M. Yagi Tohoku University Institute for Materials Research Katahira 2-1-1, Aoba-ku 980 Sendai (Japan)

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Pages:
373–380
Online Publication Date:
13 Sep 2005
Publication Date:
17 Dec 1991
Article Category:
Research Article
DOI:
https://doi.org/10.1007/bf02104690
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Abstract  

Preparation of thin film deposits of lanthanide, thorium and uranium oxides has been studied by chemical vapor deposition (CVD) method using -diketonate metal chelates with 2,2,6,6-tetramethyl-3,5-heptanedione and some reactant gases as starting materials. The deposition process was carried out using a special apparatus designed for the CVD method at atmospheric pressure and temperatures as low as 400–600°C.As a result, it was demonstrated that each chelate used was well suited for the above purpose by its high volatility and reactivity with the reactant, especially with water vapor.

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Cover Journal of Radioanalytical and Nuclear Chemistry
Journal of Radioanalytical and Nuclear Chemistry
Print ISSN:
0236-5731
Online ISSN:
1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language English
Size A4
Year of
Foundation		 1968
Volumes
per Year		 1
Issues
per Year		 12
Founder Akadémiai Kiadó
Founder's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher		 Chief Executive Officer, Akadémiai Kiadó
ISSN 0236-5731 (Print)
ISSN 1588-2780 (Online)

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