X-radiation emitted as a result of charged particle irradiation offers a means of extending the scope of analytical methods based on the measurement of prompt radiation. X-ray yields from a number of pure materials have been examined over a range of particle energies and X-ray measurement applied to the determination of a number of constituents in aluminium alloys. An examination of the distribution of silicon and germanium across an electronic component has been carried out using a small diameter incident ion beam.