Two different methods are described for measuring the depth distribution of carbon, nitrogen and oxygen in metals: Proton activation makes use of resonances in the excitation function of the (p, γ) reactions for depth determination, and with the aid of the different half-lives for for β+-decay provides information on the different constituents present. The other method makes use of the shape of neutron groups in the time-of-flight spectra from deuteron-induced reactions. Depths of some tens of microns with a resolution of fractions of a micron are studied. The detection limit is of the order of 100 ppm.