The surface and body concentrations of carbon and oxygen have been measured in various materials using prompt3He activation techniques. This target excitation functions were determined for (3He, p) reactions with carbon and oxygen over a3He energy range from 2.5 to 9.0 MeV. These data were used in the calculations of activation curves for various combinations of incident particle energy, impurity distributions, and material. Information on a computer code that was used in the analysis of the data is presented.