Analyse du phosphore dans le silicium par reactions nucleaires

E. Ligeon; M. Bruel; A. Bontemps; G. Chambert; J. Monnier

doi:10.1007/bf02514183

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Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 16: Issue 2

Analyse du phosphore dans le silicium par reactions nucleaires

Authors:

E. Ligeon

E. Ligeon Centre d'Etudes Nucléaires Départment de Recherche Fondamentale Grenoble (France)

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M. Bruel

M. Bruel Centre d'Etudes Nucléaires Départment de Recherche Fondamentale Grenoble (France)

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A. Bontemps

A. Bontemps Centre d'Etudes Nucléaires Départment de Recherche Fondamentale Grenoble (France)

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G. Chambert

G. Chambert Centre d'Etudes Nucléaires Laboratoire d'Electronique et de Technologie de l'Informatique Grenoble (France)

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, and

J. Monnier

J. Monnier Centre d'Etudes Nucléaires Laboratoire d'Electronique et de Technologie de l'Informatique Grenoble (France)

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Pages:: 537–550

Online Publication Date:: 12 Oct 2006

Publication Date:: 01 Sep 1973

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02514183

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Abstract

The determination of phosphorus is presented using the³¹P(p, α)²⁸Si reaction. The principle of the method and the instrumentation are discussed as well as the precision, sensitivity and the influence of the target thickness. The method is especially suitable for the investigation of diffusion phenomena. The concentration profiles are shown in silicon samples for various times of pretreatment. The interpretation of the profiles is given.

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Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)