Complementary use of microanalysis by the direct observation of nuclear reactions and of backscattering induced by charged particles

F. Abel; G. Amsel; E. d'Artemare; M. Bruneaux; C. Cohen; B. Maurel; C. Ortega; S. Rigo; J. Siejka; M. Croset; D. Dieumegard

doi:10.1007/bf02514186

Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 16: Issue 2

Complementary use of microanalysis by the direct observation of nuclear reactions and of backscattering induced by charged particles

Authors:

F. Abel

F. Abel Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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G. Amsel

G. Amsel Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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E. d'Artemare

E. d'Artemare Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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M. Bruneaux

M. Bruneaux Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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C. Cohen

C. Cohen Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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B. Maurel

B. Maurel Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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C. Ortega

C. Ortega Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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S. Rigo

S. Rigo Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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J. Siejka

J. Siejka Groupe de Physique des Solides de l'Ecole Normale Supérieure Tour 23, 11 Quai St-Bernard 75005 Paris (France)

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M. Croset

M. Croset Thomson-C. S. F. Laboratoire Central Corbeville 91 Orsay (France)

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, and

D. Dieumegard

D. Dieumegard Thomson-C. S. F. Laboratoire Central Corbeville 91 Orsay (France)

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Pages:: 567–586

Online Publication Date:: 12 Oct 2006

Publication Date:: 01 Sep 1973

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02514186

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Abstract

Techniques are described which combine the use of nuclear reactions and of backscattering to obtain analytical results which would be difficult or impossible to reach using one of these methods only. The principles of stoichiometry determination by plateau height analysis are developed both for backscattering and for narrow resonances of nuclear reactions. Examples of applications are given to the determination of the composition of various thin films of aluminium and silicon oxides, silicon nitrides and calcium fluorides. The analysis of samples smaller than the beam, using backscattered particle monitoring, is presented.

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Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

To see the editorial board, please visit the website of Springer Nature.

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Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)