A study of thermally oxidized SiO2 surface layers by means of nuclear reactions

A. Turos; L. Wieluński; A. Barcz; J. Oleński

doi:10.1007/bf02514192

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Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 16: Issue 2

A study of thermally oxidized SiO₂ surface layers by means of nuclear reactions

Authors:

A. Turos

A. Turos Institute of Nuclear Research Warsaw (Poland)

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L. Wieluński

L. Wieluński Institute of Nuclear Research Warsaw (Poland)

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A. Barcz

A. Barcz Institute of Nuclear Research Warsaw (Poland)

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J. Oleński

J. Oleński Institute of Electron Technology Warsaw (Poland)

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Pages:: 627–636

Online Publication Date:: 12 Oct 2006

Publication Date:: 01 Sep 1973

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02514192

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Conclusions

The nuclear reaction from low-energy deuteron-bombardment has proved to be a valuable tool for surface oxide layer examination. Using the¹⁶O(d, p)¹⁷O and¹⁶O(d, α)¹⁴N reactions, some important properties of Si−SiO₂ structures, such as total number of oxygen nuclei and oxygen concentration profile, can be determined in one measurement with an accuracy of several percent, within one hour. Some effects of oxygen deficiency in SiO₂ layers of thicknesses exceeding 6000 Å have been found. A more detailed study of this effect will be the subject of forth-coming experiments.

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Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)