This paper describes first the application of neutron depth profiling (NDP) for measuring the distribution of6Li in LiAlO2 ceramics. Using a surface barrier detector for detecting3H produced in6Li(n, )3H,6Li was profiled to a depth of 14 m in the ceramics. Secondly, a new methodology is presented for NDP with enhanced capabilities based on measuring the energy of recoiling nuclei from (n, p) and (n, ) reactions by time-of-flight mass spectrometry. The scope of recoil nucleus time-of-flight mass spectrometry (RN-TOF-MS) includes profiling of10B,14N,17O,33S,35Cl,40K. Probe depths may be of a few tens nanometers. RN-TOF-MS complements and refines NDP based on charged particle (p or ) spectrometry.