A method to resolve the interferences resulting from (n, ), (n, p) and (n,
) reactions was developed. The aluminum-silicon-phosphorus reactions were examined in detail. An analysis of the reactions and the resulting isotope concentrations, as well as the associated errors, led to a method for accounting for the interfering isotopes. Experiments showed aluminum concentrations were accurately determined even when silicon and phosphorus interferences were present. When one of the interferences was negligible and the other was within a range determined by the method, the concentration of the interfering element could also be determined.