Journal of Radioanalytical and Nuclear Chemistry
Volume/Issue:
Volume 172: Issue 1
Chemical vapor deposition using lanthanide β-diketone chelates with difluorodichloromethane
Authors:
R. Amano Kanazawa University School of Allied Medical Professions 920 Kodatsuno, Kanazawa (Japan)

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Y. Shiokawa Tohoku University The Oarai Branch, Institute of Materials Research 311-13 Oarai, Ibaraki (Japan)

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N. Sato Tohoku University Institute for Advanced Materials Processing Katahira, Aoba-ku 980 Sendai (Japan)

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Y. Suzuki Tohoku University The Oarai Branch, Institute of Materials Research 311-13 Oarai, Ibaraki (Japan)

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Pages:
81–86
Online Publication Date:
13 Aug 2005
Publication Date:
17 Aug 1993
Article Category:
Research Article
DOI:
https://doi.org/10.1007/bf02040664
Restricted access

Abstract  

Preparation of lanthanide fluoride and chloride films has been studied by chemical vapor deposition (CVD) using Ln(thd)3 (Ln=lanthanide(III); thd=2,2,6,6-tetramethyl-3,5-heptanedionato ligand) and Y(thd)3 with gas mixture systems of CF2Cl2 (difluorodichloromethane)/O2 and CF2Cl2/H2. Two kinds of fluorides, LnOF oxyfluoride and LnF3 triffluoride, were obtained separately along a CVD tube at atmospheric pressure and temperature as low as 300–600°C by the reaction of Ln(thd)3 chelates with CF2Cl2/O2 gas system. The chemical characteristics of the CVD products were considered from the thermochemical point of view.

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Cover Journal of Radioanalytical and Nuclear Chemistry
Journal of Radioanalytical and Nuclear Chemistry
Print ISSN:
0236-5731
Online ISSN:
1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language English
Size A4
Year of
Foundation		 1968
Volumes
per Year		 1
Issues
per Year		 12
Founder Akadémiai Kiadó
Founder's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher		 Chief Executive Officer, Akadémiai Kiadó
ISSN 0236-5731 (Print)
ISSN 1588-2780 (Online)

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