Authors:
K. Shikano Nippon Telephone and Telegraph Corporation NTT Interdisciplinary Research Laboratories 319-11 Tokai-mura, Ibaraki-ken (Japan)

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H. Yonezawa Nippon Telephone and Telegraph Corporation NTT Interdisciplinary Research Laboratories 319-11 Tokai-mura, Ibaraki-ken (Japan)

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T. Shigematsu Nippon Telephone and Telegraph Corporation NTT Interdisciplinary Research Laboratories 319-11 Tokai-mura, Ibaraki-ken (Japan)

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Abstract  

The charged particle activation analysis of ultra-trace carbon in boron-doped silicon with the12C(d,n)13N reaction has been developed. In order to apply13N substoichiometric separation to determine carbon in silicon, we studied the rapid dissolution of silicon using nitric acid as the13N carrier. Its amounts were as small and definite as possible and the nitrogen oxide gas produced during the dissolution was collected. Silicon was dissolved for 6 min in a mixture of hydrofluoric acid, acetic acid and phosphoric acid, which contained potassium nitrate as the13N carrier and nitrogen oxide was collected in the sodium hydroxide solution. In order to combine the dissolution method with13N substoichiometric separation, the conditions for steam distillation as pre-separation were also refined in relation to increases in the amount of carrier. Nitrogen-13 was separated substoichiometrically after silicon dissolution and steam distillation. This analytical procedure was used to determine carbon in boron-doped CZ–Si. Carbon at 0.7–12.7·1015 atoms/cm3 was determined with good reproducibility. It took less than 30 min to start the radioactivity measurement after the end of iradiation. The detection limit was 2·1013 atoms/cm3 (0.2 ppb).

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Journal of Radionalytical and Nuclear Chemistry
Language English
Size A4
Year of
Foundation
1968
Volumes
per Year
1
Issues
per Year
12
Founder Akadémiai Kiadó
Founder's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher
Chief Executive Officer, Akadémiai Kiadó
ISSN 0236-5731 (Print)
ISSN 1588-2780 (Online)