Trace determination of iron on a silicon wafer surface by silicon direct bonding and neutron activation analysis

T. Shigematsu; M. Polasek; H. Yonezawa

doi:10.1007/bf02060375

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Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 203: Issue 1

Trace determination of iron on a silicon wafer surface by silicon direct bonding and neutron activation analysis

Authors:

T. Shigematsu

T. Shigematsu NTT Interdisciplinary Research Laboratories Nippon Telegraph and Telephone Corporation Tokai 319-11 Ibaraki-ken (Japan)

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M. Polasek

M. Polasek NTT Interdisciplinary Research Laboratories Nippon Telegraph and Telephone Corporation Tokai 319-11 Ibaraki-ken (Japan)

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H. Yonezawa

H. Yonezawa NTT Interdisciplinary Research Laboratories Nippon Telegraph and Telephone Corporation Tokai 319-11 Ibaraki-ken (Japan)

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Pages:: 3–9

Online Publication Date:: 14 Aug 2005

Publication Date:: 17 Feb 1996

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02060375

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Abstract

In order to determine iron on silicon wafer surface at a level of 10¹⁴ atoms·m^–2 the efficiency of a well-type Ge detector for⁵⁹Fe -ray emissions was measured and a low temperature silicon direct bonding technique was developed. With silicon direct bonding at a temperature of 350 to 650°C iron remains near the interface of the bound silicon. The iron contamination of the interface escaped from the interface can be ignored with this technique. The value of iron obtained was (2.7 to 5.9)·10¹⁴ atoms · m^–2 in the surface on silicon wafers.

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Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)