Neutron activation analysis of iron and copper at 1013–104 atoms·m−2 on silicon wafer surface

T. Shigematsu; M. Polasek; H. Yonezawa; M. Katoh

doi:10.1007/bf02033784

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Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 216: Issue 2

Neutron activation analysis of iron and copper at 10¹³–10⁴ atoms·m⁻² on silicon wafer surface

Authors:

T. Shigematsu

T. Shigematsu Nippon Telegraph and Telephone Corporation NTT Interdisciplinary Research Laboratories 319-11 Tokai, Ibaraki-ken Japan

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M. Polasek

M. Polasek Nippon Telegraph and Telephone Corporation NTT Interdisciplinary Research Laboratories 319-11 Tokai, Ibaraki-ken Japan

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H. Yonezawa

H. Yonezawa Nippon Telegraph and Telephone Corporation NTT Interdisciplinary Research Laboratories 319-11 Tokai, Ibaraki-ken Japan

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M. Katoh

M. Katoh Nippon Telegraph and Telephone Corporation NTT Interdisciplinary Research Laboratories 319-11 Tokai, Ibaraki-ken Japan

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Pages:: 237–240

Online Publication Date:: 13 Aug 2005

Publication Date:: 17 Feb 1997

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02033784

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Abstract

The surface concentrations of copper and iron in currently used silicon wafers are lower than 10¹⁴ atoms·m^–2. To determine such ultra-trace elements accurately by neutron activation analysis, we measured the efficiencies of a well-type Ge detector for⁵⁹Fe -rays and⁶⁴Cu annihilation -rays. We also developed methods for preparing samples for copper and iron analysis including a low-temperature silicon direct-bonding technique. We have applied these techniques to determine copper and iron on the surface of clean silicon wafers, and obtained concentrations of 10¹³–10¹⁴ atoms·m^–2.

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Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)