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  • 1 Kumamoto National College of Technology 2659-2 Nishigoshi 861-11 Kumamoto Japan
  • | 2 IMEC Kapeldreef 75 B-3001 Leuven Belgium
  • | 3 Kumamoto University 2-39-1 Kurokami 860 Kumamoto Japan
  • | 4 Nippon Steel Co. 3434 Hikari 734 Yamaguchi Japan
  • | 5 Kanagawa Institute of Technology 1030 243-02 Atsugi Kanagawa Japan
  • | 6 Rikkyo University 2-5-1 240-01 Nagasaka Yokosuka, Kanagawa Japan
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Abstract  

Results are presented of a study on the degradation and recovery of the electrical performance of MOSFETs processed on SIMOX substrates, subjected to 1 and 2 MeV electron and to 20 MeV alpha-ray irradiations. The damage coefficient for alpha-ray irradiation is about three orders of magnitude larger than the one for electron irradiation, which is attributed to the difference of incident particle mass and the possibility of nuclear collision during radiation damage.

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Journal of Radionalytical and Nuclear Chemistry
Language English
Size A4
Year of
Foundation
1968
Volumes
per Year
1
Issues
per Year
12
Founder Akadémiai Kiadó
Founder's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher
Chief Executive Officer, Akadémiai Kiadó
ISSN 0236-5731 (Print)
ISSN 1588-2780 (Online)