Neutron activation analysis has been applied to determine 12 elements, viz. Na, Mn, As, Fe, Co, Zn, Se, Sc, Cr, Sb, Hf and Ta in high-purity Ga2O3. The first 7 elements could be determined by anion exchange separation and isopropyl ether extraction, and the last 8 elements by instrumental method. It is recommended that the first 3 elements are determine by one of the radiochemical modes and the others by the instrumental method.