Ion-beam surface analysis of light elements such as oxygen and carbon in light matrices (boron in our case) is mainly subject
to matrix interferences. Using a telescope detection system we show that (d, p) reaction for carbon and proton backscattering
for oxygen are able to lead to concentration profiles on the first microns of bulk boron samples. Data processing is described
and analytical results are shown, making evidence of the purification obtained using electronic bombardment furnace. Comparing
with other phhsical methods of analysis, limitation and improvements of this procedure are discussed.