In 2000, micro-beam scanning particle induced X-ray emission (PIXE) analysis system was installed in NIRS. This system provides
the ability of multi-elemental mapping on maximum 2.5 mm×2.5 mm area in a spatial resolution of about 1 μm with quadrupole
triplet magnets and a scanning coil. The estimated beam size on good tuning was 0.40×0.65 μm2, that is one of the best capacity of micro-beam scanning PIXE system in the world. The performance was tested using small
biological samples such as fish scale, pollen and small fish eye. Fine elemental maps were obtained in the samples of about
30 μm to a few mm size in the special resolution of about 1 μm.