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  • 1 National Centre for Compositional Characterization of Materials, Bhabha Atomic Research Centre, ECIL Post, Hyderabad, 500062 India
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Abstract  

The paper describes the determination and depth profiling of oxygen in thin oxide films using 18O(p,α)15N nuclear reaction. The excitation function of 18O(p,α)15N nuclear reaction exhibits a resonance at 629 keV and a plateau at 730 keV with uniform cross-section. The resonance is used to determine the depth profile of oxygen in films while the plateau, to estimate its overall concentration. The resonance, characterized by a width of 2.1 keV enables high-depth resolution (~20 nm) measurements and has a probing depth of more than a micron. The paper presents depth profile measurements of oxygen in several metal oxide films (SiO2, TiO2 and HfO2) using this resonance. Possible interferences arising from 15N(p,α)12C, 19F(p,α)16O and 11B(p,α)2α nuclear reactions are also discussed. It has been shown that it can serve as a suitable alternative to 3.05 MeV 16O(α,α)16O resonant scattering which is generally used for depth profiling oxygen. It is, in fact, more reliable and precise in materials that witness significant large angle multiple scattering. It can also be advantageously used to monitor 18O, when used as a tracer.

Manuscript Submission: HERE

  • Impact Factor (2019): 1.137
  • Scimago Journal Rank (2019): 0.360
  • SJR Hirsch-Index (2019): 65
  • SJR Quartile Score (2019): Q3 Analytical Chemistry
  • SJR Quartile Score (2019): Q3 Health, Toxicology and Mutagenesis
  • SJR Quartile Score (2019): Q2 Nuclear Energy and Engineering
  • SJR Quartile Score (2019): Q3 Pollution
  • SJR Quartile Score (2019): Q3 Public Health, Environmental and Occupational Health
  • SJR Quartile Score (2019): Q3 Radiology, Nuclear Medicine and Imaging
  • SJR Quartile Score (2019): Q3 Spectroscopy
  • Impact Factor (2018): 1.186
  • Scimago Journal Rank (2018): 0.408
  • SJR Hirsch-Index (2018): 60
  • SJR Quartile Score (2018): Q2 Nuclear Energy and Engineering
  • SJR Quartile Score (2018): Q2 Pollution

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Journal of Radionalytical and Nuclear Chemistry
Language English
Size A4
Year of
Foundation
1968
Volumes
per Year
4
Issues
per Year
12
Founder Akadémiai Kiadó
Founder's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher
Chief Executive Officer, Akadémiai Kiadó
ISSN 0236-5731 (Print)
ISSN 1588-2780 (Online)