Activation analysis and autoradiography of impurity distributions in silicon multilayer structures

H. Rausch

doi:10.1007/bf02517722

Jump to Content

Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 33: Issue 2

Activation analysis and autoradiography of impurity distributions in silicon multilayer structures

Author:

H. Rausch

H. Rausch Research Institute for Telecommunication Budapest (Hungary)

Search for other papers by H. Rausch in
Current site
Google Scholar
PubMed

View More View Less

Pages:: 201–207

Online Publication Date:: 09 Jan 2007

Publication Date:: 01 Sep 1976

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02517722

Restricted access

Abstract

Activation analysis and autoradiography were used to investigate the concentration distribution of contaminants in poly-Si−Si₃N₄−SiO₂−Si substrate multilayer structures (SNOS) on sampling each technological product. Samples were irradiated for 36 hrs at a thermal neutron flux of 4·10¹³n·cm⁻²·sec⁻¹. The thin films of the analysed sample were removed stepwise by selective chemical etching using appropriate masking techniques. Simultaneously autoradiographs were made of the surface of parallel samples activated under the same conditions. The concentration of the technological contaminants (e.g. Na, Cu, Au) increases in the junction interface of the layers as unambiguously shown by the results obtained.

Save
Cite
Email this content

Share Link

Copy this link, or click below to email it to a friend
Email this content
or copy the link directly:

https://akjournals.com/abstract/journals/10967/33/2/article-p201.xml
The link was not copied. Your current browser may not support copying via this button.

Link copied successfully

Collapse
Expand

Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

To see the editorial board, please visit the website of Springer Nature.

Manuscript Submission: HERE

For subscription options, please visit the website of Springer Nature.

Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)