Authors:
Á. Nagy Central Research Institute for Physics P.O. Box 49 H-1525 Budapest (Hungary)

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J. Bogáncs Laboratory of Neutron Physics Joint Institute for Nuclear Research Dubna P.O. Box 79 Moscow (USSR)

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J. Gyulai Central Research Institute for Physics P.O. Box 49 H-1525 Budapest (Hungary)

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A. Csőke Central Research Institute for Physics P.O. Box 49 H-1525 Budapest (Hungary)

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V. Nazarov Laboratory of Neutron Physics Joint Institute for Nuclear Research Dubna P.O. Box 79 Moscow (USSR)

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Z. Seres Laboratory of Neutron Physics Joint Institute for Nuclear Research Dubna P.O. Box 79 Moscow (USSR)

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A. Szabo Laboratory of Neutron Physics Joint Institute for Nuclear Research Dubna P.O. Box 79 Moscow (USSR)

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Yu. Yazvitsky Laboratory of Neutron Physics Joint Institute for Nuclear Research Dubna P.O. Box 79 Moscow (USSR)

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Restricted access

Abstract  

A measuring technique based on the alpha particles being released from the10B(n, α) nuclear reaction and using the time-of-flight technique at a periodically pulsing reactor was developed. Non-destructive determination for the range distribution of boron impurities in ion-implanted silicon have been performed. Projected ranges obtained in the energy region 20–80 keV are compared to calculated results and to other experiments. Examples are shown for some typical boron distributions before and after annealing the sample.

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Journal of Radionalytical and Nuclear Chemistry
Language English
Size A4
Year of
Foundation
1968
Volumes
per Year
1
Issues
per Year
12
Founder Akadémiai Kiadó
Founder's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher
Chief Executive Officer, Akadémiai Kiadó
ISSN 0236-5731 (Print)
ISSN 1588-2780 (Online)