View More View Less
  • 1 Nippon Telegraph and Telephone Public Corporation Ibaraki Electrical Communication Laboratory Tokai Ibaraki (Japan)
Restricted access

Abstract  

Uranium and thorium in LSI materials were determined by INAA and α-particles in these materials were also measured. The contents of uranium and thorium and the α-activity in ceramics and zirconia samples were very high. Calculation of α-flux from uranium and thorium contents and analysis of α-spectra were carried out for the ceramics and zirconia samples. The calculated values of α-flux in these samples agreed with the α-flux measured.