Abstract
A new method for the estimation of depth profiles of boron in silicon in extremely thin layers by means of neutron induced autoradiography is described. By the aid of ion beam etching it is possible to produce sloping cuts with angles down to 10−4–10−5. This means an extension of the depth profile by a factor of up to 5·104. In this way a depth resolution of about ±10 nm is possible. The autoradiographic model of the sloping cut for the evaluation is described and first results are discussed.
To see the editorial board, please visit the website of Springer Nature.
Manuscript Submission: HERE
For subscription options, please visit the website of Springer Nature.
| Journal of Radionalytical and Nuclear Chemistry | |
|---|---|
| Language | English |
| Size | A4 |
| Year of Foundation |
1968 |
| Volumes per Year |
1 |
| Issues per Year |
12 |
| Founder | Akadémiai Kiadó |
| Founder's Address |
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. |
| Publisher | Akadémiai Kiadó Springer Nature Switzerland AG |
| Publisher's Address |
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11. |
| Responsible Publisher |
Chief Executive Officer, Akadémiai Kiadó |
| ISSN | 0236-5731 (Print) |
| ISSN | 1588-2780 (Online) |
Monthly Content Usage
| Abstract Views | Full Text Views | PDF Downloads | |
|---|---|---|---|
| Jan 2022 | 1 | 0 | 0 |
| Feb 2022 | 0 | 0 | 0 |
| Mar 2022 | 2 | 0 | 0 |
| Apr 2022 | 0 | 0 | 0 |
| May 2022 | 0 | 0 | 0 |
| Jun 2022 | 0 | 0 | 0 |
| Jul 2022 | 0 | 0 | 0 |
Copyright Akadémiai Kiadó
AKJournals is the trademark of Akadémiai Kiadó's journal publishing business branch.
Copyright Akadémiai Kiadó AKJournals is the trademark of Akadémiai Kiadó's journal publishing business branch.
Powered by PubFactory