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  • 1 Academy of Sciences of the GDR Central Institute for Isotope and Radiation Research Permoserstraße 15 7050 Leipzig (DDR)
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Abstract  

A new method for the estimation of depth profiles of boron in silicon in extremely thin layers by means of neutron induced autoradiography is described. By the aid of ion beam etching it is possible to produce sloping cuts with angles down to 10−4–10−5. This means an extension of the depth profile by a factor of up to 5·104. In this way a depth resolution of about ±10 nm is possible. The autoradiographic model of the sloping cut for the evaluation is described and first results are discussed.

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Journal of Radionalytical and Nuclear Chemistry
Language English
Size A4
Year of
Foundation
1968
Volumes
per Year
1
Issues
per Year
12
Founder Akadémiai Kiadó
Founder's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address
H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher
Chief Executive Officer, Akadémiai Kiadó
ISSN 0236-5731 (Print)
ISSN 1588-2780 (Online)