Problems in applying secondary reactions to the activation analysis of semiconductor surface layers

H. Rausch; A. Salamon; E. Szabó

doi:10.1007/bf02514010

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Journal of Radioanalytical and Nuclear Chemistry

Volume/Issue:: Volume 9: Issue 1

Problems in applying secondary reactions to the activation analysis of semiconductor surface layers

Authors:

H. Rausch

H. Rausch Central Research Institute for Physics Budapest Hungary

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A. Salamon

A. Salamon Central Research Institute for Physics Budapest Hungary

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E. Szabó

E. Szabó Central Research Institute for Physics Budapest Hungary

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Pages:: 39–46

Online Publication Date:: 12 Oct 2006

Publication Date:: 01 Oct 1971

Article Category:: Research Article

DOI:: https://doi.org/10.1007/bf02514010

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Abstract

Investigations have been made concerning the determination of special contaminants (e.g. oxygen, boron) in the surface layers or epitaxially grown layers of semi-conductor crystals. These contaminants are insensitive to the conventional (n, γ) analysis and for their activation charged particles (e.g. t, α) from nuclear reactions induced by the capture of reactor neutrons are used. The specific particle yield from such reactions, e.g.⁶Li(n,t)α, was studied. The optimum conditions for the producing of activating layers (containing Li) and their optimum contact with the sample under investigation are discussed. Considering the so-called activation depth, a method was developed for the appropriate removal of the activated layer and the elements to be determined are subsequently separated from the semiconductor matrix by a fast chemical procedure. The combined activation cross sections measured on standard samples are given for different compositions and species of activating layers.

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Journal of Radioanalytical and Nuclear Chemistry

Print ISSN:: 0236-5731

Online ISSN:: 1588-2780

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Journal of Radionalytical and Nuclear Chemistry
Language	English
Size	A4
Year of Foundation	1968
Volumes per Year	1
Issues per Year	12
Founder	Akadémiai Kiadó
Founder's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher	Akadémiai Kiadó Springer Nature Switzerland AG
Publisher's Address	H-1117 Budapest, Hungary 1516 Budapest, PO Box 245. CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible Publisher	Chief Executive Officer, Akadémiai Kiadó
ISSN	0236-5731 (Print)
ISSN	1588-2780 (Online)