Thermal decomposition processes of rare earth sesquisulfides Ln2S3 (Ln= Lu, Y and Er) in O2 flow up to 1590 K, have been studied. Decomposition takes place through incomplete oxidations and overlapping decomposition reactions. Two intermediate phases such as Ln2O2S and Ln2O2SO4 are formed before the final more stable phase Ln2O3 (C-type) is obtained. Microstructural studies show the poor crystallinity of the intermediate products.