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  • 1 Indian Institute of Science Materials Research Centre Bangalore 560 012 India Bangalore 560 012 India
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Abstract  

Metalorganic complexes of copper have been synthesized by modifying the ligand in the β-diketonate class of compounds. Detailed thermal analysis of several β-diketonate complexes of copper has been carried out to evaluate their suitability as precursors for chemical vapor deposition (CVD). A comparison of their relative volatilities has been made by determining their sublimation rates at different temperatures. Thermal analyses of these complexes reveal significant differences among their volatilities and decomposition patterns.