Metalorganic complexes of copper have been synthesized by modifying the ligand in the β-diketonate class of compounds. Detailed
thermal analysis of several β-diketonate complexes of copper has been carried out to evaluate their suitability as precursors
for chemical vapor deposition (CVD). A comparison of their relative volatilities has been made by determining their sublimation
rates at different temperatures. Thermal analyses of these complexes reveal significant differences among their volatilities
and decomposition patterns.