The TG studies are presented for isomers of benzimidazolyl-substituted polyamides (BIPA). The TG data are compared with those polyamides (PA) of identical backbones without substitution, in view of the mechanism of thermal degradation. The TG mass loss curves divided to three temperature ranges reflect the decomposition reactions in the respective temperature ranges: (1) cleavage of single bonds of nitrogen to aromatic ring, (2) random scission of single bonds, (3) condensation of the remained rings. Liberation of benzimidazole rings occurs in the temperature range (2). The final product, char, contains benzimidazole rings. Terephthaloyl-rich BIPA's retard liberation of benzimidazole from the decomposed polymer.