Journal of Thermal Analysis and Calorimetry
Volume/Issue:
Volume 69: Issue 3
Evolution of water vapor from indium-tin-oxide thin films fabricated by various deposition processes
Authors:
S. Seki Tokyo Institute of Polytechnics Graduate School of Engineering 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan

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T. Aoyama Tokyo Institute of Polytechnics Graduate School of Engineering 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan

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Y. Sawada Tokyo Institute of Polytechnics Graduate School of Engineering 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan

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M. Ogawa Tokyo Institute of Polytechnics Graduate School of Engineering 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan

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M. Sano ESCO Co., Ltd 1-3-10, Nishikubo Musasino, Tokyo 180-0013 Japan 1-3-10, Nishikubo Musasino, Tokyo 180-0013 Japan

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N. Miyabayashi ESCO Co., Ltd 1-3-10, Nishikubo Musasino, Tokyo 180-0013 Japan 1-3-10, Nishikubo Musasino, Tokyo 180-0013 Japan

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H. Yoshida Geomatec Co., Ltd 3-13-7, Yaguchi Ota-ku, Tokyo 146-0093 Japan 3-13-7, Yaguchi Ota-ku, Tokyo 146-0093 Japan

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Y. Hoshi Tokyo Institute of Polytechnics Graduate School of Engineering 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan 1583 Iiyama Atsugi, Kanagawa 243-0297 Japan

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M. Ide Yokohama City Center for Industrial Technology and Design 1-1-1 Fukuura Kanazawa-ku, Yokohama 236-0004 Japan 1-1-1 Fukuura Kanazawa-ku, Yokohama 236-0004 Japan

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A. Shida Yokohama City Center for Industrial Technology and Design 1-1-1 Fukuura Kanazawa-ku, Yokohama 236-0004 Japan 1-1-1 Fukuura Kanazawa-ku, Yokohama 236-0004 Japan

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Pages:
1021–1028
Online Publication Date:
02 Nov 2004
Publication Date:
01 Jul 2002
Article Category:
Research Article
DOI:
https://doi.org/10.1023/a:1020649232003
Keywords:
thin films; indium-tin-oxide; water vapor; grain size; thermal desorption spectroscopy
Restricted access

Abstract  

Tin-doped In2O3 (indium-tin-oxide) transparent conducting films are widely used as electrodes of liquid crystal displays and low-E windows. In the present study, a systematic TDS study was undertaken for ITO films fabricated by various deposition processes; such as PVD, dip coating and spray deposition. Water vapor was the main gas evolved from the films; gas evolution from the silicon substrate was negligible. The evolution proceeded via two steps at approximately 373 and 473-623 K. The amount of the evolved water was in the order: (dip-coated film)>(PVD films)> (spray-deposited film). This order was identical to that of the film's resistivities.

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Cover Journal of Thermal Analysis and Calorimetry
Journal of Thermal Analysis and Calorimetry
Print ISSN:
1388-6150
Online ISSN:
1572-8943

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Journal of Thermal Analysis and Calorimetry
Language English
Size A4
Year of
Foundation		 1969
Volumes
per Year		 1
Issues
per Year		 24
Founder Akadémiai Kiadó
Founder's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher		 Chief Executive Officer, Akadémiai Kiadó
ISSN 1388-6150 (Print)
ISSN 1588-2926 (Online)

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