Journal of Thermal Analysis and Calorimetry
Volume/Issue:
Volume 69: Issue 3
Microscale temperature measurement by scanning thermal microscopy
Authors:
O. Nakabeppu Tokyo Institute of Technology Department of Mechanical Sciences and Engineering 2-12-1 Ohokayama Meguro-ku, Tokyo 152-8552 Japan 2-12-1 Ohokayama Meguro-ku, Tokyo 152-8552 Japan

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T. Suzuki Tokyo Institute of Technology Department of Mechanical Sciences and Engineering 2-12-1 Ohokayama Meguro-ku, Tokyo 152-8552 Japan 2-12-1 Ohokayama Meguro-ku, Tokyo 152-8552 Japan

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Pages:
727–737
Online Publication Date:
02 Nov 2004
Publication Date:
01 Jul 2002
Article Category:
Research Article
DOI:
https://doi.org/10.1023/a:1020683217466
Keywords:
active method; temperature measurement; thermal feedback; scanning thermal microcopy
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Abstract  

Scanning thermal microscopy (SThM) can measure thermal image with a nano-scale spatial resolution. However, there remains an issue in quantitative temperature measurement. We proposed an active temperature measurement method that provides a real temperature image by compensating a variation in contact thermal conductance. Performance of the active method was examined by a multi-function cantilever made with micro-fabrication process. Response test of the cantilever showed about 50 Hz cut off frequency for both passive and active method. Temperature measurement test indicated that sensitivity of heat flow detection was not enough to measure real temperature regardless of the thermal contact conductance. Imaging test demonstrated that the active method takes temperature image closer to real temperature distribution than the passive method.

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Cover Journal of Thermal Analysis and Calorimetry
Journal of Thermal Analysis and Calorimetry
Print ISSN:
1388-6150
Online ISSN:
1572-8943

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Journal of Thermal Analysis and Calorimetry
Language English
Size A4
Year of
Foundation		 1969
Volumes
per Year		 1
Issues
per Year		 24
Founder Akadémiai Kiadó
Founder's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
Publisher Akadémiai Kiadó
Springer Nature Switzerland AG
Publisher's
Address		 H-1117 Budapest, Hungary 1516 Budapest, PO Box 245.
CH-6330 Cham, Switzerland Gewerbestrasse 11.
Responsible
Publisher		 Chief Executive Officer, Akadémiai Kiadó
ISSN 1388-6150 (Print)
ISSN 1588-2926 (Online)

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