Living anionic polymerization of perfluoroalkyl methacrylates initiated by 1,1-diphenylhexyllithium was conducted without adding lithium chloride in an integrated flow microreactor system. The high degree of polydispersity index (PID) control was achieved at 0 °C (2-(nonafluorobutyl)ethyl and 2-(tridecafluorohexyl)ethyl methacrylates) or −40 °C (2,2,2-trifluoroethyl methacrylate). The subsequent reaction of a reactive polymer chain end with alkyl methacrylates or tert-butyl acrylate led to the formation of fluorine-containing block copolymers with narrow PDI.