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  • 1 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
  • | 2 Budapest University of Technology and Economics H-1521, P.O. Box. 91, Budapest, Hungary
  • | 3 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
  • | 4 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
  • | 5 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
  • | 6 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
  • | 7 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
  • | 8 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
  • | 9 Research Institute for Technical Physics and Materials Science H-1525 P.O. Box 49, Budapest, Hungary
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The deposition of nanowires for interconnects in nanoelectronic devices werestudied morphologically by scanning electron microscopy (SEM), atomic force microscopy (AFM) and by in-situ resistance measurements. The deposition and basic characterization of nanometer size tungsten wires by gas injection (GIS) and focused ion beams (FIB) was carried out in-situ in a LEO 1540 XB workstation. The I(V) measurement showed that the deposited W wires have ohmic characteristic. The variation of the resistance during an ex-situ heating was linear with a low thermal coefficient (4% of the pure metallic W).

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