Pollack Periodica
Volume/Issue:
Volume 5: Issue 1
On the mechanics of microsystems
Author:
Giorgio De Pasquale Politecnico di Torino Department of Mechanics Corso Duca degli Abruzzi 24 10129 Torino Italy

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Pages:
137–149
Online Publication Date:
15 Apr 2010
Publication Date:
01 Apr 2010
Article Category:
Research Article
DOI:
https://doi.org/10.1556/pollack.5.2010.1.10
Keywords:
MEMS; Mechanical design; Multiphysics; Residual stress; Mechanical fatigue
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This work is focused on the mechanical design of MEMS (micro electromechanical systems) and to the most relevant mechanically-coupled fields of interest. The paper represents an overview on some of the research topics investigated by the author in previous studies and provides a good background for the optimization of the mechanics of microsystems. The multiphysics problem is discussed, with reference to the structural-fluidic and the electromechanical coupling and their implications on the dynamic response. The stress and/or strain gradients in the material caused by building processes are introduced, as well as the MEMS reliability related to mechanical fatigue of cyclic loaded components.

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    Langer R. , 'A BioMEMS review: MEMS technology for physiologically integrated devices ' (2004 ) 92 Proc. of IEEE : 6 -21 .

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  • Varadan V. K., Vinoy K. J., Jose K. A. RF MEMS and their applications , Wiley, 2003.

  • Bogue R. MEMS sensors: past, present and future, Sensor Review , Vol. 27, No. 1, 2007, pp. 7–13.

    Bogue R. , 'MEMS sensors: past, present and future ' (2007 ) 27 Sensor Review : 7 -13 .

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  • Neukermans A., Ramaswami R. MEMS technology for optical networking applications, IEEE Communications Magazine , Vol. 39, No. 1, 2001, 62–69.

    Ramaswami R. , 'MEMS technology for optical networking applications ' (2001 ) 39 IEEE Communications Magazine : 62 -69 .

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  • Bao M., Yang H. Squeeze film air damping in MEMS, Sensors and Actuators A , Vol. 136, 2007, pp. 3–27.

    Yang H. , 'Squeeze film air damping in MEMS ' (2007 ) 136 Sensors and Actuators A : 3 -27 .

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  • Veijola T., De Pasquale G., Somà A. Experimental validation of compact damping models of perforated MEMS devices, Microsystem Technologies , Vol. 15, 2009, pp. 1121–1128.

    Somà A. , 'Experimental validation of compact damping models of perforated MEMS devices ' (2009 ) 15 Microsystem Technologies : 1121 -1128 .

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  • De Pasquale G., Veijola T. Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices, Microfluidics and Nanofluidics , Vol. 5, 2008, pp. 517–528.

    Veijola T. , 'Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices ' (2008 ) 5 Microfluidics and Nanofluidics : 517 -528 .

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  • De Pasquale G., Veijola T., Somà A. Modeling and validation of air damping in perforated gold and silicon MEMS plates, Journal of Micromechanics and Microengineering , in press.

  • De Pasquale G., Somà A. Energetic method for non linear dynamic characterization of MEMS squeeze film damping, Proc. of 5th IEEE European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS) , Venice, Italy, 2008.

  • De Pasquale G., Brusa E., Somà A. Capacitive vibration energy harvesting with resonance tuning, Proc. of IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) , Rome, Italy, 2009, pp. 280–285.

  • De Pasquale G., Somà A. Numerical and experimental validation of out-of-plane resonance closed formulas for MEMS suspended plates with square holes, Microsystem Technologies , Vol. 15, pp. 391–400.

  • De Pasquale G., Siyambalapitiya C., Somà A., Wang J. Performances improvement of MEMS sensors and energy scavengers by diamagnetic levitation, Proc. of IEEE International Conference on Electromagnetics in Advanced Applications (ICEAA) , Torino, Italy, 2009, pp. 465–468.

  • Somà A., De Pasquale G., Brusa E., Ballestra A. Effect of residual stress on the mechanical behaviour of microswitches at pull-in, Strain , in press.

  • Zaharia S. M., Martinescu I. Theoretical and experimental researches using accelerated life testing in aerospace industry, Pollack Periodica , Vol. 4, No. 2, 2009, pp. 117–122.

    Martinescu I. , 'Theoretical and experimental researches using accelerated life testing in aerospace industry ' (2009 ) 4 Pollack Periodica : 117 -122 .

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  • Somà A., De Pasquale G. MEMS mechanical fatigue: experimental results on gold microbeams, Journal of Microelectromechanical Systems , Vol. 18, No. 4, 2009, pp. 828–835.

    Pasquale G. , 'MEMS mechanical fatigue: experimental results on gold microbeams ' (2009 ) 18 Journal of Microelectromechanical Systems : 828 -835 .

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  • De Pasquale G., Somà A., Ballestra A. Mechanical fatigue analysis of gold microbeams for RF-MEMS applications by pull-in voltage monitoring, Analog Integrated Circuits and Signal Processing , Vol. 61, 2009, pp. 215–222.

    Ballestra A. , 'Mechanical fatigue analysis of gold microbeams for RF-MEMS applications by pull-in voltage monitoring ' (2009 ) 61 Analog Integrated Circuits and Signal Processing : 215 -222 .

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  • De Pasquale G., Somà A. Reliability in MEMS: design of gold devices for mechanical fatigue tests, Romanian Journal of Information Science and Technology , Vol. 11, No. 2, 2008, pp. 177–191.

    Somà A. , 'Reliability in MEMS: design of gold devices for mechanical fatigue tests ' (2008 ) 11 Romanian Journal of Information Science and Technology : 177 -191 .

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Pollack Periodica
Print ISSN:
1788-1994
Online ISSN:
1788-3911

Senior editors

Editor(s)-in-Chief: Iványi, Amália

Editor(s)-in-Chief: Iványi, Péter

 

Scientific Secretary

Miklós M. Iványi

Editorial Board

  • Bálint Bachmann (Institute of Architecture, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Jeno Balogh (Department of Civil Engineering Technology, Metropolitan State University of Denver, Denver, Colorado, USA)
  • Radu Bancila (Department of Geotechnical Engineering and Terrestrial Communications Ways, Faculty of Civil Engineering and Architecture, “Politehnica” University Timisoara, Romania)
  • Charalambos C. Baniotopolous (Department of Civil Engineering, Chair of Sustainable Energy Systems, Director of Resilience Centre, School of Engineering, University of Birmingham, U.K.)
  • Oszkar Biro (Graz University of Technology, Institute of Fundamentals and Theory in Electrical Engineering, Austria)
  • Ágnes Borsos (Institute of Architecture, Department of Interior, Applied and Creative Design, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Matteo Bruggi (Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Italy)
  • Petra Bujňáková (Department of Structures and Bridges, Faculty of Civil Engineering, University of Žilina, Slovakia)
  • Anikó Borbála Csébfalvi (Department of Civil Engineering, Institute of Smart Technology and Engineering, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Mirjana S. Devetaković (Faculty of Architecture, University of Belgrade, Serbia)
  • Szabolcs Fischer (Department of Transport Infrastructure and Water Resources Engineering, Faculty of Architerture, Civil Engineering and Transport Sciences Széchenyi István University, Győr, Hungary)
  • Radomir Folic (Department of Civil Engineering, Faculty of Technical Sciences, University of Novi Sad Serbia)
  • Jana Frankovská (Department of Geotechnics, Faculty of Civil Engineering, Slovak University of Technology in Bratislava, Slovakia)
  • János Gyergyák (Department of Architecture and Urban Planning, Institute of Architecture, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Kay Hameyer (Chair in Electromagnetic Energy Conversion, Institute of Electrical Machines, Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, Germany)
  • Elena Helerea (Dept. of Electrical Engineering and Applied Physics, Faculty of Electrical Engineering and Computer Science, Transilvania University of Brasov, Romania)
  • Ákos Hutter (Department of Architecture and Urban Planning, Institute of Architecture, Faculty of Engineering and Information Technolgy, University of Pécs, Hungary)
  • Károly Jármai (Institute of Energy and Chemical Machinery, Faculty of Mechanical Engineering and Informatics, University of Miskolc, Hungary)
  • Teuta Jashari-Kajtazi (Department of Architecture, Faculty of Civil Engineering and Architecture, University of Prishtina, Kosovo)
  • Róbert Kersner (Department of Technical Informatics, Institute of Information and Electrical Technology, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Rita Kiss  (Biomechanical Cooperation Center, Faculty of Mechanical Engineering, Budapest University of Technology and Economics, Budapest, Hungary)
  • István Kistelegdi  (Department of Building Structures and Energy Design, Institute of Architecture, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Stanislav Kmeť (President of University Science Park TECHNICOM, Technical University of Kosice, Slovakia)
  • Imre Kocsis  (Department of Basic Engineering Research, Faculty of Engineering, University of Debrecen, Hungary)
  • László T. Kóczy (Department of Information Sciences, Faculty of Mechanical Engineering, Informatics and Electrical Engineering, University of Győr, Hungary)
  • Dražan Kozak (Faculty of Mechanical Engineering, Josip Juraj Strossmayer University of Osijek, Croatia)
  • György L. Kovács (Department of Technical Informatics, Institute of Information and Electrical Technology, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Balázs Géza Kövesdi (Department of Structural Engineering, Faculty of Civil Engineering, Budapest University of Engineering and Economics, Budapest, Hungary)
  • Tomáš Krejčí (Department of Mechanics, Faculty of Civil Engineering, Czech Technical University in Prague, Czech Republic)
  • Jaroslav Kruis (Department of Mechanics, Faculty of Civil Engineering, Czech Technical University in Prague, Czech Republic)
  • Miklós Kuczmann (Department of Automations, Faculty of Mechanical Engineering, Informatics and Electrical Engineering, Széchenyi István University, Győr, Hungary)
  • Tibor Kukai (Department of Engineering Studies, Institute of Smart Technology and Engineering, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Maria Jesus Lamela-Rey (Departamento de Construcción e Ingeniería de Fabricación, University of Oviedo, Spain)
  • János Lógó  (Department of Structural Mechanics, Faculty of Civil Engineering, Budapest University of Technology and Economics, Hungary)
  • Carmen Mihaela Lungoci (Faculty of Electrical Engineering and Computer Science, Universitatea Transilvania Brasov, Romania)
  • Frédéric Magoulés (Department of Mathematics and Informatics for Complex Systems, Centrale Supélec, Université Paris Saclay, France)
  • Gabriella Medvegy (Department of Interior, Applied and Creative Design, Institute of Architecture, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Tamás Molnár (Department of Visual Studies, Institute of Architecture, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Ferenc Orbán (Department of Mechanical Engineering, Institute of Smart Technology and Engineering, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Zoltán Orbán (Department of Civil Engineering, Institute of Smart Technology and Engineering, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Dmitrii Rachinskii (Department of Mathematical Sciences, The University of Texas at Dallas, Texas, USA)
  • Chro Radha (Chro Ali Hamaradha) (Sulaimani Polytechnic University, Technical College of Engineering, Department of City Planning, Kurdistan Region, Iraq)
  • Maurizio Repetto (Department of Energy “Galileo Ferraris”, Politecnico di Torino, Italy)
  • Zoltán Sári (Department of Technical Informatics, Institute of Information and Electrical Technology, Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Grzegorz Sierpiński (Department of Transport Systems and Traffic Engineering, Faculty of Transport, Silesian University of Technology, Katowice, Poland)
  • Zoltán Siménfalvi (Institute of Energy and Chemical Machinery, Faculty of Mechanical Engineering and Informatics, University of Miskolc, Hungary)
  • Andrej Šoltész (Department of Hydrology, Faculty of Civil Engineering, Slovak University of Technology in Bratislava, Slovakia)
  • Zsolt Szabó (Faculty of Information Technology and Bionics, Pázmány Péter Catholic University, Hungary)
  • Mykola Sysyn (Chair of Planning and Design of Railway Infrastructure, Institute of Railway Systems and Public Transport, Technical University of Dresden, Germany)
  • András Timár (Faculty of Engineering and Information Technology, University of Pécs, Hungary)
  • Barry H. V. Topping (Heriot-Watt University, UK, Faculty of Engineering and Information Technology, University of Pécs, Hungary)

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2023  
Scopus  
CiteScore 1.5
CiteScore rank Q3 (Civil and Structural Engineering)
SNIP 0.849
Scimago  
SJR index 0.288
SJR Q rank Q3

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